Atlantis Press Paper Details: Accuracy Improvement in the Nano-Displacement Measurement Based on the Doppler-Interferometry Method by Cross-talk Reduction

title:

Accuracy Improvement in the Nano-Displacement Measurement Based on the Doppler-Interferometry Method by Cross-talk Reduction

publication:

JCIS-2006 Proceedings

part of series:

Advances in Intelligent Systems Research

ISBN:

978-90-78677-01-7

ISSN:

1951-6851

DOI:

doi:10.2991/jcis.2006.84 (how to use a DOI)

author(s):

Saeed Olyaee, Shahram Mohammad Nejad

corresponding author:

Saeed Olyaee

publication date:

October 2006

keywords:

cross-talk error, Doppler-interferometry, nano-displacement, He-Ne laser

abstract:

In this paper, accuracy improvement in the displacement measurement systems using Doppler-interferometry method is presented. The cross-talk error reduction methods are also discussed. Based on the mentioned method, a new nano-displacement measurement system is designed. In the designed system, the signal to leakage ratio for moving targets in the range of -20m/s to +20m/s is increased to 55dB. The measured phase detection error is equal to 7.9 degree in the normal condition, and after the cross-talk error reduction it is reduced to 0.11 degree. As a result, the displacement measurement error is decreased from 6.9nm to 0.1nm.

© Atlantis Press. This article is distributed under the terms of the Creative Commons Attribution License, which permits non-commercial use, distribution and reproduction in any medium, provided the original work is properly cited.

full text:

JCIS06-PNC-35.pdf (1234 K)

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title:		Accuracy Improvement in the Nano-Displacement Measurement Based on the Doppler-Interferometry Method by Cross-talk Reduction
publication:		JCIS-2006 Proceedings
part of series:		Advances in Intelligent Systems Research
ISBN:		978-90-78677-01-7
ISSN:		1951-6851
DOI:		doi:10.2991/jcis.2006.84 (how to use a DOI)
author(s):		Saeed Olyaee, Shahram Mohammad Nejad
corresponding author:		Saeed Olyaee
publication date:		October 2006
keywords:		cross-talk error, Doppler-interferometry, nano-displacement, He-Ne laser
abstract:		In this paper, accuracy improvement in the displacement measurement systems using Doppler-interferometry method is presented. The cross-talk error reduction methods are also discussed. Based on the mentioned method, a new nano-displacement measurement system is designed. In the designed system, the signal to leakage ratio for moving targets in the range of -20m/s to +20m/s is increased to 55dB. The measured phase detection error is equal to 7.9 degree in the normal condition, and after the cross-talk error reduction it is reduced to 0.11 degree. As a result, the displacement measurement error is decreased from 6.9nm to 0.1nm.
copyright:		© Atlantis Press. This article is distributed under the terms of the Creative Commons Attribution License, which permits non-commercial use, distribution and reproduction in any medium, provided the original work is properly cited.
full text:		JCIS06-PNC-35.pdf (1234 K)