title: |
Nanometric Displacement Measurement System Using Three-Longitudinal-Mode He-Ne Laser |
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publication: |
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part of series: |
Advances in Intelligent Systems Research | |
ISBN: |
978-90-78677-01-7 | |
ISSN: |
1951-6851 | |
DOI: |
doi:10.2991/jcis.2006.85 (how to use a DOI) | |
author(s): |
Shahram Mohammad Nejad, Saeed Olyaee |
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corresponding author: |
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publication date: |
October 2006 |
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keywords: |
He-Ne laser, three-longitudinal-mode, stabilized laser, Doppler-interferometry |
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abstract: |
In this paper, design and simulation of a nanometric displacement measurement system is discussed. The combination of the Doppler effect and interferometry method is being used. A stabilized three-longitudinal-mode He-Ne laser with 632.8nm wavelength and 35cm cavity length is used. Its primary and secondary beat frequencies are 428.60MHz, 429.27MHz, and 670kHz, respectively. Therefore, the maximum measurable velocity is equal to 106mm/s.Also, the measuring displacement is limited to the fraction of the synthetic wavelength and its accuracy will be decreased to 0.09nm. |
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copyright: |
©
Atlantis Press. This article is distributed under the
terms of the Creative Commons Attribution License, which permits
non-commercial use, distribution and reproduction in any medium,
provided the original work is properly cited. |
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full text: |