Fabrication and characterization of two-dimensional photonic crystal using holographic lithography technology
Kuo-Chang Lo 0, Mei-Li Hsieh, Yi-Sheng Lan
0Institute of Electro-Optical Science and Technology,
Available Online October 2006.
- https://doi.org/10.2991/jcis.2006.311How to use a DOI?
- photonic crystal, holographic lithography
- We propose and demonstrate a holographic system using three beams to generate periodic patterns for fabricating photonic crystals. By properly adjusting the incident angle and intensity of three laser beams, the period and structure of interference pattern can be modified. Computer simulation results will be presented and optical holographic system will be constructed. In addition, a simple optical inspection method for real-time examining the structure of photonic crystal will be developed. Optical experimental result will be demonstrated and discussed in this paper.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Kuo-Chang Lo AU - Mei-Li Hsieh AU - Yi-Sheng Lan PY - 2006/10 DA - 2006/10 TI - Fabrication and characterization of two-dimensional photonic crystal using holographic lithography technology PB - Atlantis Press SN - 1951-6851 UR - https://doi.org/10.2991/jcis.2006.311 DO - https://doi.org/10.2991/jcis.2006.311 ID - Lo2006/10 ER -