Accuracy Improvement in the Nano-Displacement Measurement Based on the Doppler-Interferometry Method by Cross-talk Reduction
Saeed Olyaee 0, Shahram Mohammad Nejad
0Iran University of Science and Technology (IUST)
Available Online October 2006.
- https://doi.org/10.2991/jcis.2006.84How to use a DOI?
- cross-talk error, Doppler-interferometry, nano-displacement, He-Ne laser
- In this paper, accuracy improvement in the displacement measurement systems using Doppler-interferometry method is presented. The cross-talk error reduction methods are also discussed. Based on the mentioned method, a new nano-displacement measurement system is designed. In the designed system, the signal to leakage ratio for moving targets in the range of -20m/s to +20m/s is increased to 55dB. The measured phase detection error is equal to 7.9 degree in the normal condition, and after the cross-talk error reduction it is reduced to 0.11 degree. As a result, the displacement measurement error is decreased from 6.9nm to 0.1nm.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Saeed Olyaee AU - Shahram Mohammad Nejad PY - 2006/10 DA - 2006/10 TI - Accuracy Improvement in the Nano-Displacement Measurement Based on the Doppler-Interferometry Method by Cross-talk Reduction BT - 9th Joint International Conference on Information Sciences (JCIS-06) PB - Atlantis Press SN - 1951-6851 UR - https://doi.org/10.2991/jcis.2006.84 DO - https://doi.org/10.2991/jcis.2006.84 ID - Olyaee2006/10 ER -