Monolithic Pyroelectric Infrared Sensor Array with Porous SiO2 Film
- DOI
- 10.2991/icmse-16.2016.86How to use a DOI?
- Keywords
- Porous thermal Insulator, Dense SiO2 film, Property uniformity
- Abstract
A simple method to fabricate pyroelectric sensors array using standard semiconductor process on Silicon substrate was investigated. 600 nm porous SiO2 film was prepared by spin coating, working as ultra-thin thermal insulator. Good insulation property was achieved owing to its extremely low thermal conductance. A dense SiO2 layer was made above porous film and provided a smooth surface for sensor fabrication process. Square sensor units of five different sizes from 0.01 mm2 to 2.25 mm2 were produced by photolithography and wet etching. The pyroelectric coefficients of these units were in the range of 2.5ž10-9 Ccm-2K-1 to 3.5ž10-9 Ccm-2K-1. Different sensor units showed similar infrared detective performance at frequency range from 5 Hz to 100 Hz. The excellent directivities were capable for applications of next generation infrared array detector.
- Copyright
- © 2016, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Xiang-Yu Sun AU - Wen-Bo Luo AU - Xin-Qiang Pan AU - Xiao-Yuan Bai AU - Jia Meng AU - Yao Shuai AU - Chuan-Gui Wu PY - 2016/12 DA - 2016/12 TI - Monolithic Pyroelectric Infrared Sensor Array with Porous SiO2 Film BT - Proceedings of the 4th 2016 International Conference on Material Science and Engineering (ICMSE 2016) PB - Atlantis Press SP - 516 EP - 521 SN - 2352-5401 UR - https://doi.org/10.2991/icmse-16.2016.86 DO - 10.2991/icmse-16.2016.86 ID - Sun2016/12 ER -