Study and Simulation of the Model of Stability Measurement for Integrated Semiconductor Equipment

DOI

10.2991/iccia.2012.442How to use a DOI?

Keywords

Parallel, Integrated Semiconductor Equipment Model of Stability, Simulation

Abstract

Performance analysis and capacity prediction of integrated semiconductor equipment is a very difficult task, it is a effective way to solve this problem by setting up a model of equipment performance measurement. This paper details the composition and related operation principle of parallel integrated semiconductor equipment. This paper also deriving a set of stability measurement model, we call it Throughput Model, for integrated semiconductor equipment according to its operation principle, which reflect the relationship between stability and output error. The model can effectively calculate the stability of equipment and help system design.

Copyright

© 2013, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Fang Xue
AU  - Qianjun Tang
AU  - Haifei Wang
AU  - Yan Zhang
AU  - Yongju Li
PY  - 2014/05
DA  - 2014/05
TI  - Study and Simulation of the Model of Stability Measurement for Integrated Semiconductor Equipment
BT  - Proceedings of the 2012 2nd International Conference on Computer and Information Application (ICCIA 2012)
PB  - Atlantis Press
SP  - 1764
EP  - 1766
SN  - 1951-6851
UR  - https://doi.org/10.2991/iccia.2012.442
DO  - 10.2991/iccia.2012.442
ID  - Xue2014/05
ER  -