Optimization of Backscattered Electron (BSE) Detector for Variable Pressure SEM with Monte Carlo method

DOI

10.2991/aisr.k.220201.017How to use a DOI?

Keywords

V-PSEM; Backscattered electron (BSE); Energy and angular distributions; MC simulations

Abstract

This work deals with The study of the energy and angular distributions of backscattered electrons (BSE) detected under vacuum and with pressure, which contribute to determining the appropriate place to put the BSE detector, we examine vacuum and air gas, the diameters of detector, we discuss its influence on the energy and angular distribution of BSE in the sample by Monte Carlo simulation to find the optimum experimental parameters needed for BSE imaging in VPSEM. For this aim, we have chosen: SiO2 as dielectric material and carbon for his lower atomic number in our results under vacuum shows that the limited geometry of the detector (detector radius) causes a great reduction of the BSE signal, The analyses demonstrate the location of a BSE detector relative to a sample surface will have a strong influence on its collection efficiency.

Copyright

© 2022 The Authors. Published by Atlantis Press International B.V.

Open Access

This is an open access article under the CC BY-NC license.

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TY  - CONF
AU  - Z. Hafsi
AU  - L. Djemoui
AU  - O. Mansour
AU  - A. Kadoun
PY  - 2022
DA  - 2022/02/02
TI  - Optimization of Backscattered Electron (BSE) Detector for Variable Pressure SEM with Monte Carlo method
BT  - Proceedings of the 2nd International Conference on Industry 4.0 and Artificial Intelligence (ICIAI 2021)
PB  - Atlantis Press
SP  - 88
EP  - 93
SN  - 1951-6851
UR  - https://doi.org/10.2991/aisr.k.220201.017
DO  - 10.2991/aisr.k.220201.017
ID  - Hafsi2022
ER  -