Design and Simulation of Electrostatic Imaging System based on MEMS
Jing-shu Kang, Xi Chen, Kai Tang, Meng-xuan Li
Available Online July 2015.
- https://doi.org/10.2991/icismme-15.2015.38How to use a DOI?
- electrostatic imaging; MEMS system; finite element analysis
- The electrostatic imaging system obtains the contour profile of charged target by sensing the electrostatic field around. In this paper, a directional electrostatic imaging system is designed based on MEMS technology. Firstly, an electrostatic imaging MEMS sensor is designed on the principle of directional electrostatic induction and the theory of micro electrostatic field sensor. The direction and sensitivity of the sensor are analyzed by using MAXWELL. Secondly, the imaging array is laid by using the directional electrostatic imaging MEMS sensor as the basic unit, and the imaging results of the imaging array is simulated. The simulation result shows that the imaging array composed by the electrostatic imaging MEMS sensor can effectively fulfill the function of imaging the target. It is also proved that the design of electrostatic imaging system based on MEMS is feasible and can improve the imaging resolution effectively compared with the previous system.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Jing-shu Kang AU - Xi Chen AU - Kai Tang AU - Meng-xuan Li PY - 2015/07 DA - 2015/07 TI - Design and Simulation of Electrostatic Imaging System based on MEMS BT - First International Conference on Information Sciences, Machinery, Materials and Energy PB - Atlantis Press SP - 182 EP - 189 SN - 1951-6851 UR - https://doi.org/10.2991/icismme-15.2015.38 DO - https://doi.org/10.2991/icismme-15.2015.38 ID - Kang2015/07 ER -