Process design and simulation of a flexible MEMS array antenna
- 10.2991/iwmecs-15.2015.80How to use a DOI?
- MEMS, LCP, process, simulation.
It is important to develop the micro-electro-mechanical system (MEMS) fabrication technology based on polymers. Liquid crystal polymer (LCP) is a suitable substrate for fabricating the flexible MEMS array antenna applied to conforming and bending conditions. This paper presents the metallization process design of the LCP substrate and the patterned process design of the flexible MEMS array antenna. Moreover, by process simulation with the software COVENTOR the process design of the flexible MEMS array antenna has been verified to be feasible.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Lin Cong AU - Lixin Xu AU - Qi Han AU - Tao Dong PY - 2015/10 DA - 2015/10 TI - Process design and simulation of a flexible MEMS array antenna BT - Proceedings of the 2015 2nd International Workshop on Materials Engineering and Computer Sciences PB - Atlantis Press SP - 398 EP - 401 SN - 2352-538X UR - https://doi.org/10.2991/iwmecs-15.2015.80 DO - 10.2991/iwmecs-15.2015.80 ID - Cong2015/10 ER -