Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)

A Fuzzy Scheduling System for Dedicated Machine Constraint

Authors
Arthur M.D. Shr1, Alan Liu, Yen-Ru Cheng
1Department of EE, National Chung Cheng University
Corresponding Author
Arthur M.D. Shr
Available Online October 2006.
DOI
https://doi.org/10.2991/jcis.2006.72How to use a DOI?
Keywords
Dedicated Machine Constraint, Fuzzy Scheduling System, Photolithography Machine, Semiconductor manufacturing.
Abstract

In this paper, we propose the Fuzzy Scheduling System (FSS) to deal with the dedicated machine constraint. The constraint of having a dedicated machine for photolithography process is the new issue introduced in photolithography machinery due to natural bias. If we randomly schedule the wafer lots to arbitrary photolithography machines at the first photolithography stage, then the load of all photolithography machines might become unbalanced. It is the main contributor to the complexity and uncertainty of the semiconductor factory. The FSS is to select the best photolithograph machines for each wafer lot at the first, unconstrained, stage to tackle this dedicated machine constraint and to maintain the load balancing among photolithography machines.

Copyright
© 2006, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)
Series
Advances in Intelligent Systems Research
Publication Date
October 2006
ISBN
978-90-78677-01-7
ISSN
1951-6851
DOI
https://doi.org/10.2991/jcis.2006.72How to use a DOI?
Copyright
© 2006, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Arthur M.D. Shr
AU  - Alan Liu
AU  - Yen-Ru Cheng
PY  - 2006/10
DA  - 2006/10
TI  - A Fuzzy Scheduling System for Dedicated Machine Constraint
BT  - Proceedings of the 9th Joint International Conference on Information Sciences (JCIS-06)
PB  - Atlantis Press
SN  - 1951-6851
UR  - https://doi.org/10.2991/jcis.2006.72
DO  - https://doi.org/10.2991/jcis.2006.72
ID  - Shr2006/10
ER  -