Influence research of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope

DOI

10.2991/jimet-15.2015.227How to use a DOI?

Keywords

silicon micro-gyroscope, fabrication error, amplitude ratio

Abstract

Influence of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope is present in this paper. Firstly, the structure and operation principle a dual-mass silicon micro-gyroscope is introduced. Then the equation of amplitude ratio between left and right proof mass is deduced. Finally, the simulation analysis of fabrication errors on modal amplitude is implemented. The simulation results show the amplitude ratio is decreased to -1.2741 when the left proof mass error is 5% in anti-phase driving mode. The amplitude ratio is increased to -0.800 when the left stiffness error is 5% in anti-phase sensing mode.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Hu Di
AU  - Yang Bo
AU  - Dai Bo
PY  - 2015/12
DA  - 2015/12
TI  - Influence research of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope
BT  - Proceedings of the 2015 Joint International Mechanical, Electronic and Information Technology Conference
PB  - Atlantis Press
SP  - 1199
EP  - 1203
SN  - 2352-538X
UR  - https://doi.org/10.2991/jimet-15.2015.227
DO  - 10.2991/jimet-15.2015.227
ID  - Di2015/12
ER  -