Design of Bias Power Supply for Magnetron Sputtering with Automatic Equalization Current
- 10.2991/eia-17.2017.43How to use a DOI?
- bias power supply for magnetron sputtering (BPSMS); combined full bridge; crossed rectification; automatic equalization current (AEC)
High power switching power supply with modularization faces the challenges of equalizing voltage and current between each module. It is difficult to guarantee the reliable equalizing current by controlled equalizing current method while the large current is changing in the arc process of magnetron sputtering. A high power BPSMS based on the input parallel output parallel phase shifted full bridge converter (IPOP-PSFB) was developed. The power supply could realize AEC via the transformer secondary side crossed rectification without adding additional control strategy. The operating mode of the main circuit and the steady-state equalizing current principle were analyzed. Finally, a 20kW experimental prototype was designed to verify the effect of AEC.
- © 2017, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Xiping HUANG AU - Guitao CHEN AU - Yanlin NIE PY - 2017/07 DA - 2017/07 TI - Design of Bias Power Supply for Magnetron Sputtering with Automatic Equalization Current BT - Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017) PB - Atlantis Press SP - 199 EP - 203 SN - 1951-6851 UR - https://doi.org/10.2991/eia-17.2017.43 DO - 10.2991/eia-17.2017.43 ID - HUANG2017/07 ER -