Double Probe Diagnosis of Surface-Wave Sustained Plasma Column

DOI

10.2991/emeit.2012.224How to use a DOI?

Keywords

Surface-Wave sustained plasma, ion density, electron temperature, plasma antennas.

Abstract

A technique has been developed to diagnose the plasma column generated with Surface-Wave sustained plasma (SWP) source under different conditions. Principal physical properties, ion density and electron temperature were studied. Influence of several factors, such as the microwave power, the gas pressure on the ion density, the electron temperature was studied. The axial and radial distribution of electron temperature and ion density was also researched. The results show the Surface-Wave sustained plasma column is able to generate plasma of about 3ev electron temperature and 1011 cm-3 ion density. It is found in the experiment that at 2 Pa in gas pressure and 60 W in input power, the ion density and electron temperature are up to 6.8×1017 m-3 and 2.8 ev at 200 mm, 1.5×1017 m-3 and 2.2 ev at 1000 mm from the base. It is also found that the physical properties can be changed by adjusting the microwave power and the pressure. So, the Surface-Wave sustained plasma column is suit for the application of plasma antennas and other relative applications.

Copyright

© 2012, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Jian LI
AU  - Kun WANG
AU  - Shi-qing WANG
PY  - 2012/09
DA  - 2012/09
TI  - Double Probe Diagnosis of Surface-Wave Sustained Plasma Column
BT  - Proceedings of the 2nd International Conference on Electronic & Mechanical Engineering and Information Technology (EMEIT 2012)
PB  - Atlantis Press
SP  - 1030
EP  - 1033
SN  - 1951-6851
UR  - https://doi.org/10.2991/emeit.2012.224
DO  - 10.2991/emeit.2012.224
ID  - LI2012/09
ER  -