Proceedings of the 6th International Conference on Electronic, Mechanical, Information and Management Society

Surface Microstructure of Monocrystalline Silicon Anisotropically Etched with Sodium Carbonate and Sodium Bicarbonate Solutions

Authors
Junjun Ma, Shiqing Man
Corresponding Author
Junjun Ma
Available Online April 2016.
DOI
https://doi.org/10.2991/emim-16.2016.196How to use a DOI?
Keywords
Microstructure; Monocrystalline silicon; Anisotropic etching; Uniformity
Abstract
The surface microstructure fabrications of monocrystalline silicon by anisotropic etching with sodium carbonate and sodium bicarbonate solutions have been studied in this paper. The microstructure fabrication process has been evaluated in terms of the surface morphology size, etching condition and uniformity. The experiments show that with the solution temperature changing, the average size of microstructure varies from 0.62 ?m to 1.42 ?m. Similarly, with the etching time increasing from 10 min to 40 min, the average size of microstructure varies from 0.62 ?m to 1.12 ?m. On the basis of our experiments, it is concluded that the optimized condition is 24 wt% Na2CO3, 4 wt% NaHCO3, 90 °C and 30 min. Under optimum conditions, the silicon wafers surface exhibit a lower average size of 0.62 ?m and the microstructures are uniform and continuous. It is hoped that it may lead to an increase in the microfabrication of manufacturing industry. Therefore, this promising technique provides an alternative way for the microstructure fabrication of monocrystalline silicon in the industrial production.
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Proceedings
6th International Conference on Electronic, Mechanical, Information and Management Society
Part of series
Advances in Computer Science Research
Publication Date
April 2016
ISBN
978-94-6252-176-6
ISSN
2352-538X
DOI
https://doi.org/10.2991/emim-16.2016.196How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Junjun Ma
AU  - Shiqing Man
PY  - 2016/04
DA  - 2016/04
TI  - Surface Microstructure of Monocrystalline Silicon Anisotropically Etched with Sodium Carbonate and Sodium Bicarbonate Solutions
BT  - 6th International Conference on Electronic, Mechanical, Information and Management Society
PB  - Atlantis Press
SP  - 950
EP  - 955
SN  - 2352-538X
UR  - https://doi.org/10.2991/emim-16.2016.196
DO  - https://doi.org/10.2991/emim-16.2016.196
ID  - Ma2016/04
ER  -