Surface Microstructure of Monocrystalline Silicon Anisotropically Etched with Sodium Carbonate and Sodium Bicarbonate Solutions
Junjun Ma, Shiqing Man
Available Online April 2016.
- https://doi.org/10.2991/emim-16.2016.196How to use a DOI?
- Microstructure; Monocrystalline silicon; Anisotropic etching; Uniformity
- The surface microstructure fabrications of monocrystalline silicon by anisotropic etching with sodium carbonate and sodium bicarbonate solutions have been studied in this paper. The microstructure fabrication process has been evaluated in terms of the surface morphology size, etching condition and uniformity. The experiments show that with the solution temperature changing, the average size of microstructure varies from 0.62 ?m to 1.42 ?m. Similarly, with the etching time increasing from 10 min to 40 min, the average size of microstructure varies from 0.62 ?m to 1.12 ?m. On the basis of our experiments, it is concluded that the optimized condition is 24 wt% Na2CO3, 4 wt% NaHCO3, 90 °C and 30 min. Under optimum conditions, the silicon wafers surface exhibit a lower average size of 0.62 ?m and the microstructures are uniform and continuous. It is hoped that it may lead to an increase in the microfabrication of manufacturing industry. Therefore, this promising technique provides an alternative way for the microstructure fabrication of monocrystalline silicon in the industrial production.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Junjun Ma AU - Shiqing Man PY - 2016/04 DA - 2016/04 TI - Surface Microstructure of Monocrystalline Silicon Anisotropically Etched with Sodium Carbonate and Sodium Bicarbonate Solutions BT - 6th International Conference on Electronic, Mechanical, Information and Management Society PB - Atlantis Press SP - 950 EP - 955 SN - 2352-538X UR - https://doi.org/10.2991/emim-16.2016.196 DO - https://doi.org/10.2991/emim-16.2016.196 ID - Ma2016/04 ER -