Characterizations of nickel oxide thin films prepared by reactive radio frequency magnetron sputtering
- https://doi.org/10.2991/icadme-15.2015.160How to use a DOI?
- Nickel Oxide; Magnetron Sputtering; Reactive Sputtering; Optical property; Electrical property
The NiO thin films were preapred by reactive radio frequency magnetron sputtering method on glass substrates. The influence of sputtering power on the crystal structure, surface morphological, optical and electrical properties was investigated using X-ray diffraction (XRD), scanning electron microscopy (SEM), ultraviolet-visible spectrophotometer (UV-VIS) and Hall effect tester, respectively. The as-preapred NiO thin films are polycrystalline with preferred orientation growth along (200) plane and have very high optical trans-mittances more than 60 %. All samples have a columnar structure with growth perpendicular to the film sur-face, and are dense, and homogeneous. With the increase of the sputtering power, a growth mode transforma-tion appears from island growth to layer growth. The lowest resistivity of 2.4 •cm could be obtained in our samples. An optimization electrical properties of the films can be achieved by the variation of crystal quality arises from the sputtering power.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Z.H. Xiao AU - X.F. Xia AU - S.J. Xu AU - Y.P. Luo AU - W. Zhong AU - H. Ou AU - E.S. Jiang PY - 2015/10 DA - 2015/10 TI - Characterizations of nickel oxide thin films prepared by reactive radio frequency magnetron sputtering BT - Proceedings of the 5th International Conference on Advanced Design and Manufacturing Engineering PB - Atlantis Press SP - 827 EP - 832 SN - 2352-5401 UR - https://doi.org/10.2991/icadme-15.2015.160 DO - https://doi.org/10.2991/icadme-15.2015.160 ID - Xiao2015/10 ER -