Proceedings of the 2016 International Conference on Artificial Intelligence: Technologies and Applications

Development and Performance Evaluation of Fine Stage for 3-DOF Error Compensation

Authors
Jae-Chang Lee, Min-Jae Lee, Hoon-Hee Lee, Seung-Han Yang
Corresponding Author
Jae-Chang Lee
Available Online January 2016.
DOI
https://doi.org/10.2991/icaita-16.2016.27How to use a DOI?
Keywords
form accuracy; fine stage; parallel mechanism; error compensation
Abstract
In this paper, a fine stage based on parallel mechanism was developed for 3-DOF error compensation to improve the form accuracy of the workpiece. This mechanism with 3-DOF motions in the plane was designed as the parallel structure for minimization and high structural stiffness. The static and dynamic stiffness analysis of the developed flexure-based mechanism have been conducted to verify the validity in displacement of workspace in the X- and Y- directions. For accurate positioning, the effect by Abbe’s offset between the measuring and driving coordinate system was analyzed and minimized. The displacement of piezoelectric actuators was determined from the measured data and inverse kinematic. The performance of the developed fine stage was evaluated through the basic performance evaluation.
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This is an open access article distributed under the CC BY-NC license.

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Volume Title
Proceedings of the 2016 International Conference on Artificial Intelligence: Technologies and Applications
Series
Advances in Intelligent Systems Research
Publication Date
January 2016
ISBN
978-94-6252-162-9
ISSN
1951-6851
DOI
https://doi.org/10.2991/icaita-16.2016.27How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Jae-Chang Lee
AU  - Min-Jae Lee
AU  - Hoon-Hee Lee
AU  - Seung-Han Yang
PY  - 2016/01
DA  - 2016/01
TI  - Development and Performance Evaluation of Fine Stage for 3-DOF Error Compensation
BT  - Proceedings of the 2016 International Conference on Artificial Intelligence: Technologies and Applications
PB  - Atlantis Press
SP  - 108
EP  - 111
SN  - 1951-6851
UR  - https://doi.org/10.2991/icaita-16.2016.27
DO  - https://doi.org/10.2991/icaita-16.2016.27
ID  - Lee2016/01
ER  -