Design of the Clean Room with Eliminating Electrostatic

DOI

10.2991/iccsae-15.2016.183How to use a DOI?

Keywords

Eliminate electrostatic; fan filter unit (FFU); high efficiency particulate air filter (HEPA); design

Abstract

The clean room with eliminating electrostatic was improved to avoid affecting electricity and impurities on properties of materials by tempered glass used as the main framework, electrostatic eliminator and HEPA built in. The effect on eliminating electrostatic and removing dusts was studied by changing size of clean room and air flow based on single variable principle. Analysis results are shown that the size of clean room is 580×580×700mm; air flow of FFU is 777.024m3/h and size is 570×570×180mm; HEPA size is 580×580×70mm via experimental data and simulation analysis. Electricity and foreign impurities are dislodged in materials by the clean room with eliminating electrostatic. It can be confirmed that the significant impact is formed in the future. Introduction

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yulong Wang
AU  - Dong Zhao
AU  - Lili Li
PY  - 2016/02
DA  - 2016/02
TI  - Design of the Clean Room with Eliminating Electrostatic
BT  - Proceedings of the 2015 5th International Conference on Computer Sciences and Automation Engineering
PB  - Atlantis Press
SP  - 995
EP  - 998
SN  - 2352-538X
UR  - https://doi.org/10.2991/iccsae-15.2016.183
DO  - 10.2991/iccsae-15.2016.183
ID  - Wang2016/02
ER  -