Experimental study on air velocity uniformity of Equipment-Fan-Filter units

DOI

10.2991/icitmi-15.2015.30How to use a DOI?

Keywords

Clean room; Equipment-fan-filter unit(EFU); Fan-filter unit(FFU); Air velocity uniformity

Abstract

This paper introduces the equipment-fan filter units (EFU) and analyzes the characteristics. Five modules samples of FFU and EFU are tested on the FFU performance test bench. Contrast shows that, there are significant variations of air velocity uniformity between the two, the central-regional velocity profiles of EFUs are worse than FFUs.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Qiuye Zhu
AU  - Xinnan Song
AU  - Jialuo Shao
PY  - 2015/10
DA  - 2015/10
TI  - Experimental study on air velocity uniformity of Equipment-Fan-Filter units
BT  - Proceedings of the 4th International Conference on Information Technology and Management Innovation
PB  - Atlantis Press
SP  - 164
EP  - 168
SN  - 2352-538X
UR  - https://doi.org/10.2991/icitmi-15.2015.30
DO  - 10.2991/icitmi-15.2015.30
ID  - Zhu2015/10
ER  -