Coulomb Interactions in a Focused Ion Beam System with a Dynamic Corrected Deflection Field
- https://doi.org/10.2991/icmii-15.2015.62How to use a DOI?
- Coulomb interactions; dynamic correction; three-dimension ion trajectory
Focused ion beam systems complement conventional processing methods and can be used to prototype and modify a diverse range of nano-devices and sensors. Controllable incident focused ion beam is difficult to obtain due to Coulomb interactions among ions. In this paper, Coulomb interactions of a practical FIB system with a dynamic corrected deflection field are obtained through solving Newton-Lorentz equations in three-dimension (3D). Firstly, the principle of the dynamic correction is analyzed and its 3D realization is given. Secondly, the principle of N-body Monte Carlo method is researched in detail before the source parameter, the 3D field, and the number of N are determined. In the end, the equations are solved by fifth-order Runge-Kutta algorithm and 3D ion trajectory is given for a 30kV FIB through the Mebs software. Simulation results coincide to the experimental those from our Canion 31+ system.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Wenping Li AU - Qian Li AU - Junbiao Liu PY - 2015/10 DA - 2015/10 TI - Coulomb Interactions in a Focused Ion Beam System with a Dynamic Corrected Deflection Field BT - Proceedings of the 3rd International Conference on Mechatronics and Industrial Informatics PB - Atlantis Press SP - 340 EP - 344 SN - 2352-538X UR - https://doi.org/10.2991/icmii-15.2015.62 DO - https://doi.org/10.2991/icmii-15.2015.62 ID - Li2015/10 ER -