Fabrication of a multilayered optical device based on submicron polyimide film
Wei Hu, Tianxiang Chen, Yong Chen
Available Online March 2016.
- 10.2991/icmmct-16.2016.178How to use a DOI?
- polyimide, filter film, space mission, atomic oxygen.
A submicron polyimide film (<1Î¼m) with high thickness uniformity was prepared via spin-coating method. Aluminum foil and patterned nickel mesh were sequentially fabricated on the surface of polyimide film using magnetron sputtering and micro-electroforming. Transmittance of the device in UV-vis waveband indicated that the thickness of aluminum plays a dominant important role rather than the other layers. The results of atomic oxygen erosion experiment of the multilayered structure, investigated by ground-based simulation facility, suggests that the Al foil was capable of protecting PI film from atomic oxygen erosion.
- © 2016, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Wei Hu AU - Tianxiang Chen AU - Yong Chen PY - 2016/03 DA - 2016/03 TI - Fabrication of a multilayered optical device based on submicron polyimide film BT - Proceedings of the 2016 4th International Conference on Machinery, Materials and Computing Technology PB - Atlantis Press SP - 896 EP - 900 SN - 2352-5401 UR - https://doi.org/10.2991/icmmct-16.2016.178 DO - 10.2991/icmmct-16.2016.178 ID - Hu2016/03 ER -