Influence analysis of microscopic image quality in surface topography

DOI

10.2991/icmmct-16.2016.356How to use a DOI?

Keywords

Measure strategies, Microscopic image quality, Surface metrology, 3D model construction

Abstract

Focus variation is an optical contact-free method that allows the measurement of 3D surface metrology using optics with limited depths of field and vertical scanning. It was documented in the ISO 25178-6 for the first time in 2010. Based on this method, two categories of typical instruments are described in two aspects: hardware part and software part. The latter part is the core technology of focus variation, including image fusion, 3D model construction and image mosaic, which are closely related to the key parameters used in the process of measurement such as exposure time, contrast and analyser. In this paper, two groups of applications were selected to demonstrate the capabilities of the instruments using different measurement parameters including measurements on cutting-insert tools, stainless steel ball, stepped workpiece, reference specimens and so on. Some principles were concluded for optical 3D surface measurement with focus variation after comparing the practical results with different parameters, serving as measurement strategies.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Yingzhong Tian
AU  - Wenjun Zhang
AU  - Ji Qi
AU  - Tinggang Jia
AU  - Long Li
PY  - 2016/03
DA  - 2016/03
TI  - Influence analysis of microscopic image quality in surface topography
BT  - Proceedings of the 2016 4th International Conference on Machinery, Materials and Computing Technology
PB  - Atlantis Press
SP  - 1787
EP  - 1793
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmmct-16.2016.356
DO  - 10.2991/icmmct-16.2016.356
ID  - Tian2016/03
ER  -