Research of Image Detection Method by Computer Vision for Photon Devices Circuit Measurement
Yaqi Fu, Jiandong Shi, Yaohua Deng, Liming Wu
Available Online March 2016.
- https://doi.org/10.2991/icmmct-16.2016.373How to use a DOI?
- Photon device line; Image Detection; Line-width; Radius of curvature
- Considering the low efficiency of manual detection method in photon devices fault checking, a new detecting method by image processing for photon device is proposed in this paper ,through the new method, photon device images are captured by camera which is installed on microscope, filtering ,mosaic, segmentation of images and curvature radius measurement are done by computer, finally, complete circuit diagram of photon devices and the necessary parameter values such as radius of curvature are got. Experiments show that the test results error is Â±0.03um,the method can improve production efficiency, shorten the production period and reduce production cost.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Yaqi Fu AU - Jiandong Shi AU - Yaohua Deng AU - Liming Wu PY - 2016/03 DA - 2016/03 TI - Research of Image Detection Method by Computer Vision for Photon Devices Circuit Measurement BT - Proceedings of the 2016 4th International Conference on Machinery, Materials and Computing Technology PB - Atlantis Press SP - 1875 EP - 1878 SN - 2352-5401 UR - https://doi.org/10.2991/icmmct-16.2016.373 DO - https://doi.org/10.2991/icmmct-16.2016.373 ID - Fu2016/03 ER -