A New Grating Displacement Measuring Method for Improving Resolution

DOI

10.2991/icsma-16.2016.19How to use a DOI?

Keywords

Grating interferometer; phase shift; displacement, ruling engine.

Abstract

A new method for improving resolution of displacement measuring system is developed in this paper. The core parts of the system is a grating interferometer and a phase-shift device. Moving the photoelectric sensor, between the two interference fringes, the signal phase of the interference fringe will be changed. The method leads to higher resolution in theory than that with laser interferometer. Experiments with the method are made in a positioning system and the' results show that the new displacement measuring method will improve the positioning accuracy about 16%.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Lun Shi
PY  - 2016/12
DA  - 2016/12
TI  - A New Grating Displacement Measuring Method for Improving Resolution
BT  - Proceedings of the 2016 4th International Conference on Sensors, Mechatronics and Automation (ICSMA 2016)
PB  - Atlantis Press
SP  - 92
EP  - 95
SN  - 1951-6851
UR  - https://doi.org/10.2991/icsma-16.2016.19
DO  - 10.2991/icsma-16.2016.19
ID  - Shi2016/12
ER  -