Design of PZT Power Supply for Micro-nano Positioning Platform Based on DSP
Lina Hao, Xinchao Zhang, Ruimin Cao
Available Online January 2016.
- 10.2991/icsmim-15.2016.5How to use a DOI?
- Micro-nano positioning platform; PZT; DSP; PZT power supply
PZT is the key actuator to high precision micro-nano positioning platform. Based on high large space density precision micro-nano positioning platform, we use DSP and four roads 16-bit DAC, high order low pass filter, the voltage amplifier circuit, power amplifier circuit, high voltage stabilizing circuit and phase compensating circuit to design PZT power supply. And also we use Multisim12 to simulate it. Through the simulation and experimental validation, the PZT power supply has continuous adjustable dc voltage 0-150 V, and the ripple is under 8mV. Then it has fast dynamic response, good stability, strongly driving ability and so on. So the PZT power supply can completely satisfy the micro-nano positioning platform.
- © 2016, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Lina Hao AU - Xinchao Zhang AU - Ruimin Cao PY - 2016/01 DA - 2016/01 TI - Design of PZT Power Supply for Micro-nano Positioning Platform Based on DSP BT - Proceedings of the 2015 4th International Conference on Sensors, Measurement and Intelligent Materials PB - Atlantis Press SP - 20 EP - 25 SN - 2352-538X UR - https://doi.org/10.2991/icsmim-15.2016.5 DO - 10.2991/icsmim-15.2016.5 ID - Hao2016/01 ER -