Study on Availability of Damping Device Design of A Photoetching Machine

DOI

10.2991/iwmecs-18.2018.124How to use a DOI?

Keywords

Photoetching machine, Device, Study

Abstract

The basal plate is key component of thin film transistor(TFT), which is mainly used to load bearing processed liquid crystal plate. To decrease the effect of ground shaking, the basal plate is usually fixed on the inner frame supported by the damping device. In this case, in addition to quarantine ground base, the damping device must quickly decrease the vibration caused by horizontal movement reaction force of the basal plate, and compensate the position fluctuation of the bumper caused by change of gravity center when the basal plate moves. With the continuous increase of the size of liquid crystal plate, the basal plate, quality and speed also continuously go up and the reaction force is also stronger and stronger that is reacted onto the inner framework, thus the requirements for the bumper become more and more serious.

Copyright

© 2018, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Qiguang Ke
PY  - 2018/04
DA  - 2018/04
TI  - Study on Availability of Damping Device Design of A Photoetching Machine
BT  - Proceedings of the 2018 3rd International Workshop on Materials Engineering and Computer Sciences (IWMECS 2018)
PB  - Atlantis Press
SP  - 598
EP  - 601
SN  - 2352-538X
UR  - https://doi.org/10.2991/iwmecs-18.2018.124
DO  - 10.2991/iwmecs-18.2018.124
ID  - Ke2018/04
ER  -