Study on Availability of Damping Device Design of A Photoetching Machine
- 10.2991/iwmecs-18.2018.124How to use a DOI?
- Photoetching machine, Device, Study
The basal plate is key component of thin film transistor(TFT), which is mainly used to load bearing processed liquid crystal plate. To decrease the effect of ground shaking, the basal plate is usually fixed on the inner frame supported by the damping device. In this case, in addition to quarantine ground base, the damping device must quickly decrease the vibration caused by horizontal movement reaction force of the basal plate, and compensate the position fluctuation of the bumper caused by change of gravity center when the basal plate moves. With the continuous increase of the size of liquid crystal plate, the basal plate, quality and speed also continuously go up and the reaction force is also stronger and stronger that is reacted onto the inner framework, thus the requirements for the bumper become more and more serious.
- © 2018, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Qiguang Ke PY - 2018/04 DA - 2018/04 TI - Study on Availability of Damping Device Design of A Photoetching Machine BT - Proceedings of the 2018 3rd International Workshop on Materials Engineering and Computer Sciences (IWMECS 2018) PB - Atlantis Press SP - 598 EP - 601 SN - 2352-538X UR - https://doi.org/10.2991/iwmecs-18.2018.124 DO - 10.2991/iwmecs-18.2018.124 ID - Ke2018/04 ER -