Mechanical System Design and Analysis of Three Dimensional Scanning Probe Based on Flexible Parallel Mechanism
- https://doi.org/10.2991/mcei-16.2016.252How to use a DOI?
- Canning probe; Parallel mechanism; Decoupling
Mechanical coupling is one of the key factors that cause scanning probe mechanical error. Minimizing or eliminating the mechanical coupling error can Optimize structural design of the probe. A three-dimensional scanning probe is designed with three-brach flexibility parallel mechanism, whose guiding stiffness based on the energy method is derived. Mechanical coupling error is simulated and analyzed with finite element method in the paper. The result shows that three-branch parallel scanning probe reduces the mechanical coupling error to about 20% of the error of serial mechanism probe.
- © 2017, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Beibei Wu AU - Hongxi Wang AU - Yaxiao Wang AU - Weiwei Li PY - 2016/12 DA - 2016/12 TI - Mechanical System Design and Analysis of Three Dimensional Scanning Probe Based on Flexible Parallel Mechanism BT - Proceedings of the 2016 6th International Conference on Mechatronics, Computer and Education Informationization (MCEI 2016) PB - Atlantis Press SP - 1225 EP - 1232 SN - 1951-6851 UR - https://doi.org/10.2991/mcei-16.2016.252 DO - https://doi.org/10.2991/mcei-16.2016.252 ID - Wu2016/12 ER -