Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012)

The Fabrication of the Microfluidic Device with Micro- and Nano- Scale Channels

Authors
Fu Guangchun, Zheng Zezhi, Li Yang, Chen Hong
Corresponding Author
Fu Guangchun
Available Online December 2012.
DOI
https://doi.org/10.2991/mems.2012.164How to use a DOI?
Keywords
microfluidic device; nanochannel
Abstract
Here a simple method for fabrication of the microfluidic device with micro- and nanochannels was developed. The microchannels in micro and nano scales were fabricated on a glass substrate during a two- step process respectively. And then the glass substrate with the microchannels was bonded with another flat glass substrate at room temperature to avoid the collapse of the nanochannels. Standard UV lithography and wet etching were used in this method. The nanochannels with a series of depths were obtained with optimized etchant concentration of 1.5×10-2 mol L-1 HF, 7.5×10-3 mol L-1 HNO3 and 7.5×10-3 mol L-1 NH4F, and the depth had a linear relationship with the etching time (the square of correlation coefficient was 0.9983). The roughness length of the etched nanochannel was 2.045 nm investigated by atomic force microscopy (AFM). The substrate was then bonded with a flat glass plate to form a closed microchannel, the cross-section of the bonded microchannel was imaged by a scanning electron microscopy (SEM). With this method, the microchannels combined with micro and nano scale can be prepared conveniently with low cost.
Open Access
This is an open access article distributed under the CC BY-NC license.

Download article (PDF)

Volume Title
Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012)
Series
Advances in Intelligent Systems Research
Publication Date
December 2012
ISBN
978-90-78677-59-8
ISSN
1951-6851
DOI
https://doi.org/10.2991/mems.2012.164How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Fu Guangchun
AU  - Zheng Zezhi
AU  - Li Yang
AU  - Chen Hong
PY  - 2012/12
DA  - 2012/12
TI  - The Fabrication of the Microfluidic Device with Micro- and Nano- Scale Channels
BT  - Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012)
PB  - Atlantis Press
SP  - 627
EP  - 630
SN  - 1951-6851
UR  - https://doi.org/10.2991/mems.2012.164
DO  - https://doi.org/10.2991/mems.2012.164
ID  - Guangchun2012/12
ER  -