A New 3-D Assembly Approach For Nanoelectromechanical Switch Fabrication
Yang Chen, Xie Hui, Yan Jihong, Zhao Jie
Available Online December 2012.
- https://doi.org/10.2991/mems.2012.190How to use a DOI?
- nanoelectromechanical switch; 3-D nanoassembly; electrostatic force actuation ; electrical characterization
- Achieving high-accuracy and repeatable fabrication of nanoelectromechanical switch is a grand challenge. In this paper, a new approach based on 3-D nanomanipulation has been proposed to integrate zinc oxide nanowire with lithographically patterned electrodes. Compared with other methods, a high level of manipulation accuracy can be reached without utilizing advanced lithographic tools. The device itself is actuated by electrostatic force and its physical model has also been developed for determining several key parameters. After the process of assembly, an in situ electrical characterization experiment is conducted. Experimental results illustrate the low pull-in voltages of the device combined with nearly zero current leakage, which are key parameters for being a good substitute of the CMOS devices in the future.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Yang Chen AU - Xie Hui AU - Yan Jihong AU - Zhao Jie PY - 2012/12 DA - 2012/12 TI - A New 3-D Assembly Approach For Nanoelectromechanical Switch Fabrication BT - Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012) PB - Atlantis Press SP - 725 EP - 730 SN - 1951-6851 UR - https://doi.org/10.2991/mems.2012.190 DO - https://doi.org/10.2991/mems.2012.190 ID - Chen2012/12 ER -