Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012)

A New 3-D Assembly Approach For Nanoelectromechanical Switch Fabrication

Authors
Yang Chen, Xie Hui, Yan Jihong, Zhao Jie
Corresponding Author
Yang Chen
Available Online December 2012.
DOI
https://doi.org/10.2991/mems.2012.190How to use a DOI?
Keywords
nanoelectromechanical switch; 3-D nanoassembly; electrostatic force actuation ; electrical characterization
Abstract
Achieving high-accuracy and repeatable fabrication of nanoelectromechanical switch is a grand challenge. In this paper, a new approach based on 3-D nanomanipulation has been proposed to integrate zinc oxide nanowire with lithographically patterned electrodes. Compared with other methods, a high level of manipulation accuracy can be reached without utilizing advanced lithographic tools. The device itself is actuated by electrostatic force and its physical model has also been developed for determining several key parameters. After the process of assembly, an in situ electrical characterization experiment is conducted. Experimental results illustrate the low pull-in voltages of the device combined with nearly zero current leakage, which are key parameters for being a good substitute of the CMOS devices in the future.
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This is an open access article distributed under the CC BY-NC license.

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Volume Title
Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012)
Series
Advances in Intelligent Systems Research
Publication Date
December 2012
ISBN
978-90-78677-59-8
ISSN
1951-6851
DOI
https://doi.org/10.2991/mems.2012.190How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Yang Chen
AU  - Xie Hui
AU  - Yan Jihong
AU  - Zhao Jie
PY  - 2012/12
DA  - 2012/12
TI  - A New 3-D Assembly Approach For Nanoelectromechanical Switch Fabrication
BT  - Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012)
PB  - Atlantis Press
SP  - 725
EP  - 730
SN  - 1951-6851
UR  - https://doi.org/10.2991/mems.2012.190
DO  - https://doi.org/10.2991/mems.2012.190
ID  - Chen2012/12
ER  -