Design of Corrugated Diaphragm-Based MEMS Pressure Sensor for Biomedical Applications

DOI

10.2991/apr.k.220503.021How to use a DOI?

Keywords

blood; COMSOL; diaphragm; MEMS; pressure; sensor

Abstract

In this work we present the simulation analysis of a Micro Electro Mechanical Systems (MEMS) based capacitive pressure sensor for the measurement of blood pressure in the range 0 - 40kPa. We consider a circular corrugated silicon diaphragm and simulate the diaphragm’s response to the applied pressure. Corrugations are introduced in the diaphragm in order to achieve larger displacements with improved linearity thereby increasing the sensitivity of the sensor. We consider sinusoidal corrugations and study the effect of the design parameters such as diaphragm thickness, corrugation depth, and number of corrugations on the displacement-pressure linear relation. The results are compared with that of the flat diaphragm. The deflection of the corrugated diaphragm also causes a variation in the capacitance value of the sensor with respect to the applied pressure. In order to analyze the performance of the corrugated diaphragm the capacitive response was studied for the pressure range 0 - 40kPa and compared with that of the flat diaphragm. Modeling and simulation analysis of the diaphragm deflections were carried out using the COMSOL Multiphysics software

Copyright

© 2022 The Authors. Published by Atlantis Press International B.V.

Open Access

This is an open access article distributed under the CC BY-NC 4.0 license.

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TY  - CONF
AU  - P Rinihaa Sibishree
AU  - G Gnanasangeetha
PY  - 2022
DA  - 2022/05/25
TI  - Design of Corrugated Diaphragm-Based MEMS Pressure Sensor for Biomedical Applications
BT  - Proceedings of the Soedirman International Conference on Mathematics and Applied Sciences (SICOMAS 2021)
PB  - Atlantis Press
SP  - 104
EP  - 108
SN  - 2352-541X
UR  - https://doi.org/10.2991/apr.k.220503.021
DO  - 10.2991/apr.k.220503.021
ID  - Sibishree2022
ER  -