Design and Simulation of Copper-based Multimetal-contact RF MEMS Switch

DOI

10.2991/wartia-16.2016.239How to use a DOI?

Keywords

RF MEMS switch, material hardness, multilayer stack, copper

Abstract

This paper presents the design and simulation of metal-contact RF microelectromechanical system (MEMS) switch based on the multilayer metal stack Au/Cu/Au. The novel concept of Au/Cu/Au contact metallization is introduced to increase the hardness of the contact material. The mechanical and RF characteristics of the designed switch are investigated by CoventorWare and ANSOFT HFSS. The simulation results indicate that the pull-in voltage is 32V, the closing time is 25 s, and the opening time is 18 s. The insertion loss is better than -0.12dB and isolation is better than -25dB up to 20GHz.

Copyright

© 2016, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Zhaoqun Jiang
AU  - Zhuhao Gong
AU  - Zewen Liu
PY  - 2016/05
DA  - 2016/05
TI  - Design and Simulation of Copper-based Multimetal-contact RF MEMS Switch
BT  - Proceedings of the 2016 2nd Workshop on Advanced Research and Technology in Industry Applications
PB  - Atlantis Press
SP  - 1128
EP  - 1133
SN  - 2352-5401
UR  - https://doi.org/10.2991/wartia-16.2016.239
DO  - 10.2991/wartia-16.2016.239
ID  - Jiang2016/05
ER  -