Research Progress of Quartz Tuning Fork Micromachined Gyroscope

DOI

10.2991/aiie-15.2015.100How to use a DOI?

Keywords

Coriolis acceleration; piezoelectric effect; quartz tuning fork; micromachined gyroscope; anisotropic etching

Abstract

This paper presents a review of the working principle, the development and the research progress of the quartz tuning fork micromachined gyroscopes. Then, the fabrication process, the performance parameters and the application fields of the QRS are illustrated. Next, the development trends and the existing problems are analyzed, including the uneven crystal edges of the quartz sidewall caused by the fabrication process, the confined etchant layer technology and the electrode fabrication technique. In summary, the QRSs are widely applied in many fields, including military and commercial applications, because of its small size, lightweight, low power consumption, high resistance to overload and availability in harsh environments.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - M.Y. Fan
AU  - L.F. Zhang
PY  - 2015/07
DA  - 2015/07
TI  - Research Progress of Quartz Tuning Fork Micromachined Gyroscope
BT  - Proceedings of the 2015 International Conference on Artificial Intelligence and Industrial Engineering
PB  - Atlantis Press
SP  - 361
EP  - 364
SN  - 1951-6851
UR  - https://doi.org/10.2991/aiie-15.2015.100
DO  - 10.2991/aiie-15.2015.100
ID  - Fan2015/07
ER  -