Molecular Dynamics Study of Nanoimprint of Single Crystal Aluminium Thin Film

DOI

10.2991/aiie-15.2015.129How to use a DOI?

Keywords

nanoimprint; molecular dynamics; single crystal aluminium; thin film, stamp

Abstract

In current study, molecular dynamics simulations are performed to investigate nanoimprint processes on single crystal aluminium thin films with silicon stamp. An EAM potential developed for aluminium is adopted to describe the Al-Al interaction in the aluminium thin film, and the Lennard-Jones potential is used to describe the Al-Si atomic interaction. Simulations show that dislocation events are the main plastic deformation mode of Al thin film in nanoimprint. It is found that stamp size and stamp shape have significant influence on the dislocation events and imprint forces during the nanoimprint processes.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Y. Yuan
AU  - T. Sun
AU  - J.J. Zhang
AU  - C. Liu
PY  - 2015/07
DA  - 2015/07
TI  - Molecular Dynamics Study of Nanoimprint of Single Crystal Aluminium Thin Film
BT  - Proceedings of the 2015 International Conference on Artificial Intelligence and Industrial Engineering
PB  - Atlantis Press
SP  - 476
EP  - 479
SN  - 1951-6851
UR  - https://doi.org/10.2991/aiie-15.2015.129
DO  - 10.2991/aiie-15.2015.129
ID  - Yuan2015/07
ER  -