An object-oriented and colored timed Petri Net Model for automated Interbay material handling system of semiconductor wafer fab

DOI

10.2991/asei-15.2015.164How to use a DOI?

Keywords

Semiconductor, Interbay, Object, Petri net, Model.

Abstract

To analyze the performance of automated Interbay material handling system in semiconductor wafer fabrication system, an Object-oriented and Colored Timed Petri Net (OCTPN) model was presented. The model could describe the practical hardware and operation considerations of Interbay system, such as transportation rail, shortcut, stocker and routing of overhead hoist transporters. To decrease complexity of modeling process, these practical hardware and operation considerations of Interbay system were encapsulated with object class. Therefore, the OCTPN model could be re-configurable and re-usable. With data from an Interbay material handling system of 200 mm semiconductor wafer fab, an illustrative example is built to evaluate the model. The result shows that the proposed OCTPN model is effective.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Lihui Wu
AU  - Dengjie Zhu
AU  - Zhaoyun Wu
PY  - 2015/05
DA  - 2015/05
TI  - An object-oriented and colored timed Petri Net Model for automated Interbay material handling system of semiconductor wafer fab
BT  - Proceedings of the 2015 International conference on Applied Science and Engineering Innovation
PB  - Atlantis Press
SP  - 838
EP  - 841
SN  - 2352-5401
UR  - https://doi.org/10.2991/asei-15.2015.164
DO  - 10.2991/asei-15.2015.164
ID  - Wu2015/05
ER  -