An object-oriented and colored timed Petri Net Model for automated Interbay material handling system of semiconductor wafer fab
- 10.2991/asei-15.2015.164How to use a DOI?
- Semiconductor, Interbay, Object, Petri net, Model.
To analyze the performance of automated Interbay material handling system in semiconductor wafer fabrication system, an Object-oriented and Colored Timed Petri Net (OCTPN) model was presented. The model could describe the practical hardware and operation considerations of Interbay system, such as transportation rail, shortcut, stocker and routing of overhead hoist transporters. To decrease complexity of modeling process, these practical hardware and operation considerations of Interbay system were encapsulated with object class. Therefore, the OCTPN model could be re-configurable and re-usable. With data from an Interbay material handling system of 200 mm semiconductor wafer fab, an illustrative example is built to evaluate the model. The result shows that the proposed OCTPN model is effective.
- © 2015, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Lihui Wu AU - Dengjie Zhu AU - Zhaoyun Wu PY - 2015/05 DA - 2015/05 TI - An object-oriented and colored timed Petri Net Model for automated Interbay material handling system of semiconductor wafer fab BT - Proceedings of the 2015 International conference on Applied Science and Engineering Innovation PB - Atlantis Press SP - 838 EP - 841 SN - 2352-5401 UR - https://doi.org/10.2991/asei-15.2015.164 DO - 10.2991/asei-15.2015.164 ID - Wu2015/05 ER -