Study of the Method to Capture the Loose Particles inside the Device Cavity
Xuan Pei, Shanbin Xi, Zhaofeng Gao, Kui Zhang
Available Online April 2017.
- 10.2991/eame-17.2017.49How to use a DOI?
- particles; particle impact noise detection (PIND); radiography; scanning electron microscope (SEM)
The paper introduced the method to capture the particles inside the devices cavity in detail. The method included several steps, which were as follows: particles detection, grinding cover plate, cleaning cover plate, holing cover plate, capturing particles and particles analysis. The particles would be controlled effectively only
- © 2017, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Xuan Pei AU - Shanbin Xi AU - Zhaofeng Gao AU - Kui Zhang PY - 2017/04 DA - 2017/04 TI - Study of the Method to Capture the Loose Particles inside the Device Cavity BT - Proceedings of the 2017 2nd International Conference on Electrical, Automation and Mechanical Engineering (EAME 2017) PB - Atlantis Press SP - 203 EP - 206 SN - 2352-5401 UR - https://doi.org/10.2991/eame-17.2017.49 DO - 10.2991/eame-17.2017.49 ID - Pei2017/04 ER -