Economic Value of Using CrWN Films and the Contribution of Using Control Chart for Process Stability

DOI

10.2991/eia-17.2017.16How to use a DOI?

Keywords

CrWN;co-sputter; grey-taguchi method; control charts

Abstract

This study investigates the optimization of direct current reactive co-sputter deposition process parameters to achieve multiple performance characteristics (roughness, roundness, and flank wear) in the CrWN thin films by the Grey-Taguchi method. In the confirmation runs, when using grey relational analysis, improvement of 17.045% was obtained in surface roughness, 20.833% in roundness, and 28.354% in flank wear, respectively. Furthermore, control charts tell us when special causes of variation are impacting the direct current reactive co-sputter deposition process and product characteristics are stable over time.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Shih-Hung TAI
AU  - Chun-Yao HSU
AU  - I-Shin CHEN
PY  - 2017/07
DA  - 2017/07
TI  - Economic Value of Using CrWN Films and the Contribution of Using Control Chart for Process Stability
BT  - Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017)
PB  - Atlantis Press
SP  - 71
EP  - 74
SN  - 1951-6851
UR  - https://doi.org/10.2991/eia-17.2017.16
DO  - 10.2991/eia-17.2017.16
ID  - TAI2017/07
ER  -