Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017)

Economic Value of Using CrWN Films and the Contribution of Using Control Chart for Process Stability

Authors
Shih-Hung TAI, Chun-Yao HSU, I-Shin CHEN
Corresponding Author
Shih-Hung TAI
Available Online July 2017.
DOI
https://doi.org/10.2991/eia-17.2017.16How to use a DOI?
Keywords
CrWN;co-sputter; grey-taguchi method; control charts
Abstract

This study investigates the optimization of direct current reactive co-sputter deposition process parameters to achieve multiple performance characteristics (roughness, roundness, and flank wear) in the CrWN thin films by the Grey-Taguchi method. In the confirmation runs, when using grey relational analysis, improvement of 17.045% was obtained in surface roughness, 20.833% in roundness, and 28.354% in flank wear, respectively. Furthermore, control charts tell us when special causes of variation are impacting the direct current reactive co-sputter deposition process and product characteristics are stable over time.

Copyright
© 2017, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017)
Series
Advances in Intelligent Systems Research
Publication Date
July 2017
ISBN
10.2991/eia-17.2017.16
ISSN
1951-6851
DOI
https://doi.org/10.2991/eia-17.2017.16How to use a DOI?
Copyright
© 2017, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Shih-Hung TAI
AU  - Chun-Yao HSU
AU  - I-Shin CHEN
PY  - 2017/07
DA  - 2017/07
TI  - Economic Value of Using CrWN Films and the Contribution of Using Control Chart for Process Stability
BT  - Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017)
PB  - Atlantis Press
SP  - 71
EP  - 74
SN  - 1951-6851
UR  - https://doi.org/10.2991/eia-17.2017.16
DO  - https://doi.org/10.2991/eia-17.2017.16
ID  - TAI2017/07
ER  -