Economic Value of Using CrWN Films and the Contribution of Using Control Chart for Process Stability
- 10.2991/eia-17.2017.16How to use a DOI?
- CrWN;co-sputter; grey-taguchi method; control charts
This study investigates the optimization of direct current reactive co-sputter deposition process parameters to achieve multiple performance characteristics (roughness, roundness, and flank wear) in the CrWN thin films by the Grey-Taguchi method. In the confirmation runs, when using grey relational analysis, improvement of 17.045% was obtained in surface roughness, 20.833% in roundness, and 28.354% in flank wear, respectively. Furthermore, control charts tell us when special causes of variation are impacting the direct current reactive co-sputter deposition process and product characteristics are stable over time.
- © 2017, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Shih-Hung TAI AU - Chun-Yao HSU AU - I-Shin CHEN PY - 2017/07 DA - 2017/07 TI - Economic Value of Using CrWN Films and the Contribution of Using Control Chart for Process Stability BT - Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017) PB - Atlantis Press SP - 71 EP - 74 SN - 1951-6851 UR - https://doi.org/10.2991/eia-17.2017.16 DO - 10.2991/eia-17.2017.16 ID - TAI2017/07 ER -