Micromachined Quartz Tuning Fork Gyroscope with High Overload Capacity

DOI

10.2991/eia-17.2017.17How to use a DOI?

Keywords

high overload; quartz tuning fork; positions limit; cushion; reliability

Abstract

To protect MEMS gyroscopes based on the quartz tuning fork in a high-g shock environment, the support bonding regions are located at where the stress concentrates in the spring beam of the tuning fork. After an analysis of the high overload shock characteristics, a highly efficient cushion structure is designed based on the ABAQUS finite element simulation. The cantilever-mass system is simplified to an equivalent mass attached to the end of the cantilever beam and the displacement response under the simple harmonic motion is simulated. A design of the position limit structure is explored and the strength distribution of the elastic quartz tuning fork is optimized. Therefore, the high shock resistance of 20,000g can be achieved and the good performance is maintained with an increase of the threshold by nearly 10 times.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Maoyan FAN
AU  - Lifang ZHANG
PY  - 2017/07
DA  - 2017/07
TI  - Micromachined Quartz Tuning Fork Gyroscope with High Overload Capacity
BT  - Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017)
PB  - Atlantis Press
SP  - 75
EP  - 79
SN  - 1951-6851
UR  - https://doi.org/10.2991/eia-17.2017.17
DO  - 10.2991/eia-17.2017.17
ID  - FAN2017/07
ER  -