Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017)

Micromachined Quartz Tuning Fork Gyroscope with High Overload Capacity

Authors
Maoyan FAN, Lifang ZHANG
Corresponding Author
Maoyan FAN
Available Online July 2017.
DOI
https://doi.org/10.2991/eia-17.2017.17How to use a DOI?
Keywords
high overload; quartz tuning fork; positions limit; cushion; reliability
Abstract

To protect MEMS gyroscopes based on the quartz tuning fork in a high-g shock environment, the support bonding regions are located at where the stress concentrates in the spring beam of the tuning fork. After an analysis of the high overload shock characteristics, a highly efficient cushion structure is designed based on the ABAQUS finite element simulation. The cantilever-mass system is simplified to an equivalent mass attached to the end of the cantilever beam and the displacement response under the simple harmonic motion is simulated. A design of the position limit structure is explored and the strength distribution of the elastic quartz tuning fork is optimized. Therefore, the high shock resistance of 20,000g can be achieved and the good performance is maintained with an increase of the threshold by nearly 10 times.

Copyright
© 2017, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017)
Series
Advances in Intelligent Systems Research
Publication Date
July 2017
ISBN
10.2991/eia-17.2017.17
ISSN
1951-6851
DOI
https://doi.org/10.2991/eia-17.2017.17How to use a DOI?
Copyright
© 2017, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Maoyan FAN
AU  - Lifang ZHANG
PY  - 2017/07
DA  - 2017/07
TI  - Micromachined Quartz Tuning Fork Gyroscope with High Overload Capacity
BT  - Proceedings of the 2017 International Conference on Electronic Industry and Automation (EIA 2017)
PB  - Atlantis Press
SP  - 75
EP  - 79
SN  - 1951-6851
UR  - https://doi.org/10.2991/eia-17.2017.17
DO  - https://doi.org/10.2991/eia-17.2017.17
ID  - FAN2017/07
ER  -