Characterization by SIMS of silicon Layer deposited by VPE on SiP in the Solar cells with thin layers
- 10.2991/gmee-15.2015.41How to use a DOI?
- SIMS; photovoltaic; silicon; characterization
Classically, in the field of photovoltaic, porous silicon (PS) is used as an antireflecting layer, but these last years, we are interested in a new application of this material, which allows, by technologies very different from proceed usual to detach from the singlecrystal thin layers from a substrate. An electrochemical attack is carried out on a silicon substrate, with times and densities of current variable so as to obtain two layers of gradual porosities being formed from surface (strong porosity in-depth). We carry out then a hydrogenation (to passivate the structure), an epitaxy in liquid phase (LPE) or Vapor Phase Epitaxy (VPE), and then we carry out the cell. During the temperature treatment high, porous silicon is recristallized partially. Then separation is made once the cell carried out, by sticking a transparent plastic film on surface and by applying a weak force (the PS being used as sacrificial layer). In this study, a characterization by secondary spectroscopy of mass of the ions (SIMS) informs us about the level of doping and the concentration of the carriers, and, electronic microscopy has sweeping (SEM) informs us about porous morphologies of these layer.
- © 2015, the Authors. Published by Atlantis Press.
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- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Malika Madani AU - Amaria Bensaoula AU - Fethi Benkhenafou AU - Wen Shi AU - Weiwei DU AU - Lyes Douadji PY - 2015/12 DA - 2015/12 TI - Characterization by SIMS of silicon Layer deposited by VPE on SiP in the Solar cells with thin layers BT - Proceedings of the 2nd International Conference on Green Materials and Environmental Engineering PB - Atlantis Press SP - 155 EP - 158 SN - 2352-5401 UR - https://doi.org/10.2991/gmee-15.2015.41 DO - 10.2991/gmee-15.2015.41 ID - Madani2015/12 ER -