Proceedings of the 3rd International Conference on Material, Mechanical and Manufacturing Engineering

Structural, Surface Morphology and Optical Properties of Pulsed Laser Deposited ZnO Thin Films at Various Laser Pulse Energies

Authors
Ying Huang, Jia Yuan Qin, Xiao Ming Shen, Nguyen Manhtai, Yue Chun Fu, Huan He, Shu Long Lu, Li Feng Bian
Corresponding Author
Ying Huang
Available Online August 2015.
DOI
https://doi.org/10.2991/ic3me-15.2015.426How to use a DOI?
Keywords
ZnO thin films, pulsed laser deposition, optical properties, laser pulse energy
Abstract
ZnO thin films have been deposited on ITO substrates by pulsed laser deposition at various laser pulse energies. The crystalline structure, surface morphology and optical properties of ZnO thin films were characterized by X-ray diffraction (XRD), atomic force microscope (AFM) and UV-Visible measurements. The results showed that ZnO thin films grew along with (002) preferential orientation and had optimal crystalline quality when laser pulse energy kept in 180mJ P-1. In addition, the films had smooth surface and compacted structure. Laser pulse energy had little influence on the transmittance of ZnO thin films in visible light region and the transmittance of all the ZnO thin films is above 80%. It also can be found that the film thickness and optical band gap increased with the increase of laser pulse energy from 150mJ P-1 to 200mJ P-1.
Open Access
This is an open access article distributed under the CC BY-NC license.

Download article (PDF)

Proceedings
3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015)
Part of series
Advances in Engineering Research
Publication Date
August 2015
ISBN
978-94-6252-100-1
ISSN
2352-5401
DOI
https://doi.org/10.2991/ic3me-15.2015.426How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Ying Huang
AU  - Jia Yuan Qin
AU  - Xiao Ming Shen
AU  - Nguyen Manhtai
AU  - Yue Chun Fu
AU  - Huan He
AU  - Shu Long Lu
AU  - Li Feng Bian
PY  - 2015/08
DA  - 2015/08
TI  - Structural, Surface Morphology and Optical Properties of Pulsed Laser Deposited ZnO Thin Films at Various Laser Pulse Energies
BT  - 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015)
PB  - Atlantis Press
SN  - 2352-5401
UR  - https://doi.org/10.2991/ic3me-15.2015.426
DO  - https://doi.org/10.2991/ic3me-15.2015.426
ID  - Huang2015/08
ER  -