Study on dielectric property of BST of gradient thick films

DOI

10.2991/icaise.2013.26How to use a DOI?

Keywords

Mn doping, thick film, composition gradient, dielectric property

Abstract

The multilayer BST thick film with composition gradient is becoming the important alternative material for the infrared detector and microwave modulator due to its good comprehensive dielectric properties such as moderate dielectric constant and high dielectric-temperature coefficient, etc. The Mn-doped BST thick film with six different layers of composition gradients is fabricated in the Pt/Ti/SiO2/Si silicon chip by improved sol-gel method. The thick film is about 5 m thick. Then the micro structure and dielectric property of the gradient thick film is studied. The XRD analysis shows that the thick film with complete perovskite structure can be obtained when the heat treatment temperature reaches 750 . The SEM microscope demonstrates that the surface grains have uniform size with dense arrangement and good density, and the dielectric peak temperature zone of the gradient BST thick film covers the normal temperature with dielectric coefficient 920 and dielectric loss approximately 1.8×10-2.

Copyright

© 2013, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Maoyan Fan
AU  - Lifang Zhang
PY  - 2013/08
DA  - 2013/08
TI  - Study on dielectric property of BST of gradient thick films
BT  - Proceedings of the 2013 The International Conference on Artificial Intelligence and Software Engineering (ICAISE 2013)
PB  - Atlantis Press
SP  - 121
EP  - 124
SN  - 1951-6851
UR  - https://doi.org/10.2991/icaise.2013.26
DO  - 10.2991/icaise.2013.26
ID  - Fan2013/08
ER  -