Proceedings of the International Conference on Communication and Signal Processing 2016 (ICCASP 2016)

Chemical Machining of Monel

Authors
Deepakkumar Patil, Rupesh Dugad, Sachin Farakate, Mudigonda Sadaiah
Corresponding Author
Deepakkumar Patil
Available Online December 2016.
DOI
https://doi.org/10.2991/iccasp-16.2017.20How to use a DOI?
Keywords
Chemical machining, depth of etch, undercut, Monel 400
Abstract
This study shows the effect of etching condition on microchannel of 100 µm width. Microchannels were fabricated on Monel 400 substrate by using different concentration of Ferric chloride (FeCl3) and nitric acid (HNO3) in water. Effect of exposure time on channel width and peel off resistance of photoresist is also studied. It is found that etching temperature has significant effect on undercut and depth of etch.
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This is an open access article distributed under the CC BY-NC license.

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Proceedings
International Conference on Communication and Signal Processing 2016 (ICCASP 2016)
Part of series
Advances in Intelligent Systems Research
Publication Date
December 2016
ISBN
978-94-6252-305-0
DOI
https://doi.org/10.2991/iccasp-16.2017.20How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Deepakkumar Patil
AU  - Rupesh Dugad
AU  - Sachin Farakate
AU  - Mudigonda Sadaiah
PY  - 2016/12
DA  - 2016/12
TI  - Chemical Machining of Monel
BT  - International Conference on Communication and Signal Processing 2016 (ICCASP 2016)
PB  - Atlantis Press
UR  - https://doi.org/10.2991/iccasp-16.2017.20
DO  - https://doi.org/10.2991/iccasp-16.2017.20
ID  - Patil2016/12
ER  -