Static Analysis of Coupled Micro - beams at both Ends of Electromechanical Coupling
Ning Sun, Dawei Chen, Daolin Jiang
Available Online May 2017.
- https://doi.org/10.2991/icmeit-17.2017.71How to use a DOI?
- MEMS, Fixed beam at both ends, The deflection, Thickness.
- In the micro electro-mechanical system, the electrostatic coupling of the micro-beam at both ends is often used as the driving structure, so it is very important to study the static analysis of the micro-beam structure. The relationship between the geometric structure parameters and the maximum deflection is analyzed by using the Trans coupling unit of Trans126 in ANASYS, and the relationship between the flexural rigidity and the thickness of the micro-beads in the micro electro-mechanical structure is further revealed.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Ning Sun AU - Dawei Chen AU - Daolin Jiang PY - 2017/05 DA - 2017/05 TI - Static Analysis of Coupled Micro - beams at both Ends of Electromechanical Coupling BT - Proceedings of the 2nd International Conference on Mechatronics Engineering and Information Technology (ICMEIT 2017) PB - Atlantis Press SP - 365 EP - 368 SN - 2352-538X UR - https://doi.org/10.2991/icmeit-17.2017.71 DO - https://doi.org/10.2991/icmeit-17.2017.71 ID - Sun2017/05 ER -