The Research of a Laser Micro Displacement Measuring System Based on the Spectral Interference of Optic Fiber Principle
Hui Zhang, Jun Shen, Wei Wang
Available Online March 2016.
- https://doi.org/10.2991/icmmct-16.2016.137How to use a DOI?
- the two-beam interference of a single fiber, athermalization probe, phase difference and displacement, accuracy, range
- In this article, a design of a laser micro displacement measuring system based on the spectral interference of optic fiber principle is presented. This system makes the transmission and interference of laser occur in a single fiber. At the same time, a kind of athermalization probe based on the wedge-shaped fiber and angulated to the fiber is designed, improving the anti-interference ability of the system. Besides, a model of the spectral interference of optical fiber system with the center wavelength of 1550 nm has been set up. The measurement accuracy of the system can research 300 nm and the measurement range can research around 1mm. The system not only has good anti-interference ability but also solves the problem of the coexistence of the nanometer-level measurement accuracy and the large-span measurement range.
- Open Access
- This is an open access article distributed under the CC BY-NC license.
Cite this article
TY - CONF AU - Hui Zhang AU - Jun Shen AU - Wei Wang PY - 2016/03 DA - 2016/03 TI - The Research of a Laser Micro Displacement Measuring System Based on the Spectral Interference of Optic Fiber Principle BT - Proceedings of the 2016 4th International Conference on Machinery, Materials and Computing Technology PB - Atlantis Press SP - 707 EP - 710 SN - 2352-5401 UR - https://doi.org/10.2991/icmmct-16.2016.137 DO - https://doi.org/10.2991/icmmct-16.2016.137 ID - Zhang2016/03 ER -