Proceedings of the 2015 6th International Conference on Manufacturing Science and Engineering

Construction and experiment on micro-gyroscope detection balance loop

Authors
Xiaolei Wang, Xiangyang Zhao, Lingzhi Cao, Yucui Liu, Jitao Zhang
Corresponding Author
Xiaolei Wang
Available Online December 2015.
DOI
10.2991/icmse-15.2015.179How to use a DOI?
Keywords
micro-gyroscope; detection balance loop; Coriolis effect; closed-loop control
Abstract

In order to overcome the defect of open-loop detection of micro-gyroscope, based on comb capacitance detection of micro-structure, the working principle of electrostatic force suppressing capacitance comb vibration was analyzed. The Coriolis signal vibration amplitude of micro-gyroscope was extracted; with the Coriolis vibration amplitude as the control variable, the detection balance loop of micro-gyroscope was constructed. The experimental result shows that the constructed detection balance loop is able to balance the Coriolis force and suppress the Coriolis vibration. The scale factor linearity and symmetry have greatly enhanced, and the measurement range, the threshold and resolution have improved at some extent.

Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Download article (PDF)

Volume Title
Proceedings of the 2015 6th International Conference on Manufacturing Science and Engineering
Series
Advances in Engineering Research
Publication Date
December 2015
ISBN
10.2991/icmse-15.2015.179
ISSN
2352-5401
DOI
10.2991/icmse-15.2015.179How to use a DOI?
Copyright
© 2015, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Xiaolei Wang
AU  - Xiangyang Zhao
AU  - Lingzhi Cao
AU  - Yucui Liu
AU  - Jitao Zhang
PY  - 2015/12
DA  - 2015/12
TI  - Construction and experiment on micro-gyroscope detection balance loop
BT  - Proceedings of the 2015 6th International Conference on Manufacturing Science and Engineering
PB  - Atlantis Press
SP  - 988
EP  - 992
SN  - 2352-5401
UR  - https://doi.org/10.2991/icmse-15.2015.179
DO  - 10.2991/icmse-15.2015.179
ID  - Wang2015/12
ER  -