Key Technology of Electrochemical Micromachining with Laser masking

DOI

10.2991/ifmeita-17.2018.37How to use a DOI?

Keywords

Electrochemical micromachining, Fiber laser, Masking, 304 Stainless steel, Combined machining.

Abstract

In order to fabricate the micro patterns cavities with micro size on 304 stainless steel, electrochemical micromachining (EMM) with laser masking based on surface modification by fiber laser masking was studied, and a device of laser-assisted EMM with the special pulse power supply was developed to achieve micro machining, which possessed the complete control system. Laser marking on the surface of 304 stainless steel can first be realized by fiber laser scanning and heating. During laser marking, metal oxide layer with pre-designed pattern can be formed by laser marking, and phase transformation can also occur at the laser scanning area on 304 stainless steel surface, which forms the laser masking layer with good corrosion resistance. The stainless steel surface with laser masking layer is subsequently etched by EMM, the laser masking layer severs as the temporary protective layer without relying on lithography mask. Accordingly, micro pattern cavities can fast be fabricated. Through machining experiments, the typical samples 23 m deep were fabricated under the optimized parameters.

Copyright

© 2018, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Xiaohai Li
AU  - Shuming Wang
AU  - Dong Wang
AU  - Han Tong
PY  - 2018/02
DA  - 2018/02
TI  - Key Technology of Electrochemical Micromachining with Laser masking
BT  - Proceedings of the 2nd International Forum on Management, Education and Information Technology Application (IFMEITA 2017)
PB  - Atlantis Press
SP  - 215
EP  - 219
SN  - 2352-5398
UR  - https://doi.org/10.2991/ifmeita-17.2018.37
DO  - 10.2991/ifmeita-17.2018.37
ID  - Li2018/02
ER  -