Proceedings of the International Conference on Logistics, Engineering, Management and Computer Science

Field-Distribution’s CAD and Characteristics of Electrostatic Immersion Objective

Authors
Xingquan Wang, Fengpeng Wang, Jun Huang, Shoucai Yuan
Corresponding Author
Xingquan Wang
Available Online July 2015.
DOI
https://doi.org/10.2991/lemcs-15.2015.17How to use a DOI?
Keywords
Electrostatic immersion objective; Successive Approximation method; Field-distribution; Potential; CAD
Abstract
Based on the numerical calculation method, a program is designed to solve the field distributions and equipotential lines in a electrostatic immersion objective. Then the characteristics are discussed. Successive approximation method is used to solve the finite difference equation of field distributions and the scan-line searching method is used to solve the coordinate of equipotential lines. Results from the program show that the rotationally symmetric electric field is characterized by nonuniformity so that the electron beam can be focused and imaged. Also axial potential distributions are nonlinear to produce a radial force and equipotential lines are distributed in a saddle on the nearby axial extreme point of potential. The program offers a exact and effective way to design the electrostatic immersion objective.
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This is an open access article distributed under the CC BY-NC license.

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Proceedings
International Conference on Logistics Engineering, Management and Computer Science (LEMCS 2015)
Part of series
Advances in Intelligent Systems Research
Publication Date
July 2015
ISBN
978-94-6252-102-5
ISSN
1951-6851
DOI
https://doi.org/10.2991/lemcs-15.2015.17How to use a DOI?
Open Access
This is an open access article distributed under the CC BY-NC license.

Cite this article

TY  - CONF
AU  - Xingquan Wang
AU  - Fengpeng Wang
AU  - Jun Huang
AU  - Shoucai Yuan
PY  - 2015/07
DA  - 2015/07
TI  - Field-Distribution’s CAD and Characteristics of Electrostatic Immersion Objective
BT  - International Conference on Logistics Engineering, Management and Computer Science (LEMCS 2015)
PB  - Atlantis Press
SN  - 1951-6851
UR  - https://doi.org/10.2991/lemcs-15.2015.17
DO  - https://doi.org/10.2991/lemcs-15.2015.17
ID  - Wang2015/07
ER  -