Field-Distribution’s CAD and Characteristics of Electrostatic Immersion Objective

DOI

10.2991/lemcs-15.2015.17How to use a DOI?

Keywords

Electrostatic immersion objective; Successive Approximation method; Field-distribution; Potential; CAD

Abstract

Based on the numerical calculation method, a program is designed to solve the field distributions and equipotential lines in a electrostatic immersion objective. Then the characteristics are discussed. Successive approximation method is used to solve the finite difference equation of field distributions and the scan-line searching method is used to solve the coordinate of equipotential lines. Results from the program show that the rotationally symmetric electric field is characterized by nonuniformity so that the electron beam can be focused and imaged. Also axial potential distributions are nonlinear to produce a radial force and equipotential lines are distributed in a saddle on the nearby axial extreme point of potential. The program offers a exact and effective way to design the electrostatic immersion objective.

Copyright

© 2015, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Xingquan Wang
AU  - Fengpeng Wang
AU  - Jun Huang
AU  - Shoucai Yuan
PY  - 2015/07
DA  - 2015/07
TI  - Field-Distribution’s CAD and Characteristics of Electrostatic Immersion Objective
BT  - Proceedings of the International Conference on Logistics, Engineering, Management and Computer Science
PB  - Atlantis Press
SP  - 88
EP  - 92
SN  - 1951-6851
UR  - https://doi.org/10.2991/lemcs-15.2015.17
DO  - 10.2991/lemcs-15.2015.17
ID  - Wang2015/07
ER  -