Electromechanical Coupled Non-linear Dynamics for Micro Plate Simply supported on four Sides
- 10.2991/mems.2012.138How to use a DOI?
- micro plate; MEMS; non-linear dynamics; small deflection theory; Linz Ted-Poincare method
Dynamic characteristic of the micro plate under the micro scale effect shows non-linear features, traditional linear analysis methods can not satisfy the design precision of MEMS system, and non-linear dynamics analysis method provides an effective solution. In this paper, based on the small deflection theory and electrostatics theory, take typical boundary condition of the micro plate simply supported on four sides as example, the basic differential equation of lateral vibration is established, using Linz Ted-Poincare method, displacement and time course of forced vibration, time responses of forced vibration are calculated. The research results provide theoretical basis for optimizing the system parameters, improving the ability to resist interferences and increases the reliability.
- © 2012, the Authors. Published by Atlantis Press.
- Open Access
- This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).
Cite this article
TY - CONF AU - Sun Libo AU - Xu Lizhong PY - 2012/12 DA - 2012/12 TI - Electromechanical Coupled Non-linear Dynamics for Micro Plate Simply supported on four Sides BT - Proceedings of the 1st International Conference on Mechanical Engineering and Material Science (MEMS 2012) PB - Atlantis Press SP - 525 EP - 528 SN - 1951-6851 UR - https://doi.org/10.2991/mems.2012.138 DO - 10.2991/mems.2012.138 ID - Libo2012/12 ER -