4-DOF Mechanism Design for Reflectors in Vacuum

DOI

10.2991/mme-16.2017.52How to use a DOI?

Keywords

Vacuum, Reflectors, Mechanism design, Kinematic analysis, 4-DOF.

Abstract

The paper developed a new type of 4-DOF mechanism design for reflectors in vacuum, which had the ability of assembling the reflector stably and realizing 4-DOF movement (one-translation and three-rotation) of the reflector in vacuum by adjustments outside the vacuum. Then the equations of kinematic analysis were finalized based on the mechanism design. Finally the 4-DOF mechanism design was testified by a practical example. The mechanism design can be used in the field of extreme ultraviolet lithography, as well as other precision machining and positioning applications.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Jin-Xin Chen
AU  - Wan-Lu Xie
AU  - Xiao-Bin Wu
AU  - Yu Wang
PY  - 2016/12
DA  - 2016/12
TI  - 4-DOF Mechanism Design for Reflectors in Vacuum
BT  - Proceedings of the 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)
PB  - Atlantis Press
SP  - 382
EP  - 388
SN  - 2352-5401
UR  - https://doi.org/10.2991/mme-16.2017.52
DO  - 10.2991/mme-16.2017.52
ID  - Chen2016/12
ER  -