Proceedings of the 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)

Growth Feature of Diamond-Like Carbon Films by Various Vacuum Plasma Methods

Authors
Zhi-Feng Wang, Bing Zhou, Zhu-Bo Liu, Zhi-Yong He
Corresponding Author
Zhi-Feng Wang
Available Online December 2016.
DOI
10.2991/mme-16.2017.75How to use a DOI?
Keywords
Diamond-like carbon, Vacuum plasma methods, Microstructure, Surface morphology, Optical property.
Abstract

Diamond-like carbon (DLC) films were prepared on silicon substrate using four different vacuum plasma methods: magnetron sputtering (MS), pulse laser ablation (PLA), ion beam deposition (IBD) and pulse cathode vacuum arc evaporation (CVAE). The microstructure, surface morphology and optical properties of the DLC films were investigated by Raman spectroscopy, atomic force microscope (AFM) and UV-visible spectrophotometer. The results showed that the films prepared by different vacuum plasma methods varied in the microstructure. The film prepared by CVAE possessed the smallest grain size of graphite with the highest disordering of Csp2 clusters, while more disordered Csp2 clusters presented in the DLC film due to the high ions energy density during PLA. Meanwhile, the deposition methods mainly affected the size of particles and roughness of the DLC films under the same thickness. The film by PLA shows a quite smooth surface structure with uniform particle size. In terms of the optical properties, the films prepared by magnetron sputtering expressed the best optical performance among the four vacuum plasma methods.

Copyright
© 2017, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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Volume Title
Proceedings of the 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)
Series
Advances in Engineering Research
Publication Date
December 2016
ISBN
10.2991/mme-16.2017.75
ISSN
2352-5401
DOI
10.2991/mme-16.2017.75How to use a DOI?
Copyright
© 2017, the Authors. Published by Atlantis Press.
Open Access
This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

Cite this article

TY  - CONF
AU  - Zhi-Feng Wang
AU  - Bing Zhou
AU  - Zhu-Bo Liu
AU  - Zhi-Yong He
PY  - 2016/12
DA  - 2016/12
TI  - Growth Feature of Diamond-Like Carbon Films by Various Vacuum Plasma Methods
BT  - Proceedings of the 3rd Annual International Conference on Mechanics and Mechanical Engineering (MME 2016)
PB  - Atlantis Press
SP  - 552
EP  - 557
SN  - 2352-5401
UR  - https://doi.org/10.2991/mme-16.2017.75
DO  - 10.2991/mme-16.2017.75
ID  - Wang2016/12
ER  -