Optic Grating Sensor Based High Precision Straight-line Displacement Measurement and Its Error Analysis

DOI

10.2991/smont-19.2019.48How to use a DOI?

Keywords

optic grating; quadruple frequency circuit; displacement measurement

Abstract

To accomplish precision straight-line and angular displacement measurement, the principle and realizing methods on the basis of optical grating are analyzed in detail. A new quadruple frequency circuit and its relative analogous circuit are designed, including scaling circuit of optical grating sensor and display module. For realizing displacement measurement in nanometer-size, corresponding software system of type-51 single chip microcomputer as a control core has designed accordingly. Output display and optic grating signal processing in real-time are achieved. Finally, the error source of system is discussed and error analysis is carried out in this paper. The experimental results show that system can realize high precision measurement and can be used in fine measuring instrument for high precision displacement measurement.

Copyright

© 2019, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Songlin Wu
AU  - Lei Dang
AU  - Qian Yang
AU  - Bochen Bai
AU  - Longfei Gao
PY  - 2019/04
DA  - 2019/04
TI  - Optic Grating Sensor Based High Precision Straight-line Displacement Measurement and Its Error Analysis
BT  - Proceedings of the 2019 International Conference on Modeling, Simulation, Optimization and Numerical Techniques (SMONT 2019)
PB  - Atlantis Press
SP  - 215
EP  - 218
SN  - 1951-6851
UR  - https://doi.org/10.2991/smont-19.2019.48
DO  - 10.2991/smont-19.2019.48
ID  - Wu2019/04
ER  -