Analysis on a Preparation and Optical performance of Porous Silicon - Based Sensing Materials

DOI

10.2991/wartia-17.2017.8How to use a DOI?

Keywords

Porous Silicon; Preparation; Optical performance; Sensing

Abstract

In the paper, the surface uniform porous silicon thin film material was prepared by using the pulse electrochemical etching method under orthogonal parameters. Analysis of Surface Morphology of Porous Silicon under Atomic Force Microscopy, the optimum preparation conditions were obtained with good optical properties. The optical reflectance spectra of porous silicon films with different porosities were obtained by using the designed porous silicon thin film reflection spectroscopy system, and the refractive index and absorption system spectra were obtained by MATLAB software simulation, which provides the basis for the development and application of porous silicon-based sensing devices.

Copyright

© 2017, the Authors. Published by Atlantis Press.

Open Access

This is an open access article distributed under the CC BY-NC license (http://creativecommons.org/licenses/by-nc/4.0/).

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TY  - CONF
AU  - Ran Zhang
AU  - Tiecheng Wang
AU  - Yonglei Zhao
PY  - 2017/11
DA  - 2017/11
TI  - Analysis on a Preparation and Optical performance of Porous Silicon - Based Sensing Materials
BT  - Proceedings of the 3rd Workshop on Advanced Research and Technology in Industry (WARTIA 2017)
PB  - Atlantis Press
SP  - 40
EP  - 48
SN  - 2352-5401
UR  - https://doi.org/10.2991/wartia-17.2017.8
DO  - 10.2991/wartia-17.2017.8
ID  - Zhang2017/11
ER  -